Fabrication and Analysis of Amorphous In-Ga-Zn-O Thin-Film Transistors with Film-Profile-Engineering
博士 === 國立交通大學 === 電子工程學系 電子研究所 === 104 === In this dissertation, we have successfully fabricated and characterized high-performance amorphous In-Ga-Zn-O (a-IGZO) thin-film transistors (TFTs) with sub-micron channel length by using the novel “film-profile-engineering” (FPE) approach. In this approach...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/03258775007511195319 |