Electrical Characterizations of p-GaN Thin Films Grown by Two-Heater MOCVD
碩士 === 國立交通大學 === 電子物理系所 === 104 === In this thesis, we use the home-made Two-Heater MOCVD reactor to grow p-type GaN thin film. We aim to investigate the effects of substrate temperature(Ts) and ceiling temperature(Tc) on the films quality. The electrical, structure and optical quality were analyze...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/14553971811035483007 |