Investigation of NEMS and MEMS Magnetic-Domain-Based Sensors and Actuators
碩士 === 國立交通大學 === 機械工程系所 === 104 === In this thesis, Nano/Mirco scale sensor and actuators based on magnetic domain structure made by MEMS fabrication was reported. By changing the geometry and dimension of the magnetic domain structures can significantly transform the domains into different magneti...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19120163101733947919 |