Study on Minimization of the Dry Etch Undercut for High Temperature Aluminum Process
碩士 === 國立交通大學 === 工學院半導體材料與製程設備學程 === 104 === To reduce the fabrication cost, we replaced the conventional tungsten plug process based on the design rule for 6-inch wafers with the aluminum plug process. The replacement of the plug material significantly changes the process characteristics of patter...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/p28t9y |