Application of Boomerang Chart to Real-World Mass Production Wafer Maps
碩士 === 國立中央大學 === 電機工程學系 === 104 === In this paper, we use Boomerang Chart that we published in the past to analyze the classified wafer maps in a great view, whether the distribution of defects uniform or not and verify it in mass production. At first, we choose five kinds of size of wafers tha...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/93539216431114992560 |