Growth and Characterization of AlInN/AlN/GaN Heterostructures on 6-inch Si Substrates
碩士 === 國立中央大學 === 電機工程學系 === 104 === This study aims at growing high electron mobility and low channel resistance AlInN/GaN heterostructures on Si substrates by metal-organic chemical vapor deposition, and the investigation of carrier scattering mechanisms in these heterostructures. In order to redu...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75689759994782567860 |