Design and Analysis of Susceptor for MOCVD with Experimental Verification
碩士 === 國立中央大學 === 機械工程學系 === 104 === Metal organic chemical vapor deposition (MOCVD) process is a technology in fabrication of GaN-based optoelectronic devices, such as LEDs. The substrate for growing GaN thin film is usually sapphire. Temperature distribution on the substrate surface is affected by...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53961993009401955042 |