Effects of metal contacts on the electrical properties of MoS2 thin films
碩士 === 國立彰化師範大學 === 電子工程學系 === 104 === In order to obtain a large area MoS2 thin film, herein we utilized sulfurization progress of e-gun evaporated Mo film on Si substrates. We sulfured Mo films in a quartz tube of a horizontal furnace utilizing rich sulfur to fabricate MoS2 thin film. Based on...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/12983628101918374403 |