Preparation and function testing of non-contact air floating table.
碩士 === 國立東華大學 === 材料科學與工程學系 === 104 === This article is intended to use the high gas permeability of the porous ceramic to replace the traditional non-contract air floating table. With porous material having micron ratings pores, we can make higher loading capacity, higher stiffness and stability of...
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| Format: | Others |
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2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/61018910603762255358 |