具低干涉運動之三軸向壓電定位平台研發
博士 === 國立高雄第一科技大學 === 工學院工程科技博士班 === 104 === Recently, due to increasingly high-degree of precision and miniaturized sizes of consumer products and instruments, the demand for precision positioning devices is greatly presented. In addition, with the trend of increasing multi-function of merchandised...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/g39t29 |