具低干涉運動之三軸向壓電定位平台研發

• Main Authors: Bo-Jheng Li, 利柏正
• Other Authors: Yung-tien Liu
• Format: Others
• Language: zh-TW
• Published: 2016
• Online Access: http://ndltd.ncl.edu.tw/handle/g39t29

博士 === 國立高雄第一科技大學 === 工學院工程科技博士班 === 104 === Recently, due to increasingly high-degree of precision and miniaturized sizes of consumer products and instruments, the demand for precision positioning devices is greatly presented. In addition, with the trend of increasing multi-function of merchandised products, the positioning devices with single-axis function have been developed to multi-axis function, and widely applied to various fields of products. In this thesis, focusing on the developing trend of multi-axis positioning device, a 3-axis positioning stage with low interference motions was proposed. The positioning stage was composed of a XY positioning stage and a Z-axis tool holder, which were actuated by piezoelectric (PZT) actuators combined with symmetric flexure hinges. The proposed positioning stage features low interference motions, multi-axis actuation, high stiffness, fast response, and high precision. In the beginning of developing the stage, employing finite element method to analyze the stage for acquiring the suitable design parameters. In the next, an experimental setup of the positioning stage was configured. To know the characteristics of positioning stage, the experiments of step response, frequency response, stepwise motion and Lissajous motion are performed. Through the experiments, it is known that when the applied voltage was 50 V, the displacements along the X-, Y-, and Z-axes were measured as 6.35 μm, 6.61 μm, and 10.12 μm, respectively, with the corresponding small percentages of interference displacement of 3.80%, 4.02%, and 3.30%. In addition, the resonant frequencies were obtained as 1.06 kHz, 0.65 kHz, and 0.54 kHz. Finally, to examine control performances, a real-time control system considering hysteresis effect of PZT actuators was implemented by the field-programmable gate array (FPGA) to conduct tracing controls for sinusoidal waveform, 3D Lissajous motion, and 3D spiral motion. The tracing errors along 3-axisactuations were under 30 nm. With the developed 3-axis positioning stage, a 3-axis vibration cutting was also proposed for ultraprecision/micro machining in this thesis. The proposed vibration cutting could transform the conventional orthogonal cutting into oblique cutting, thus reduce the cutting resistance. Through cutting experiment for a brass workpiece, it was found that when the oblique angle was 90° and the vibration frequency was 100 Hz, the cutting resistance could be reduced with 32.61% by comparing to orthogonal cutting. In addition, cutting experiment for a rectangle feature was performed. The surface roughness was measured as 0.17 μm and 0.26 μm along the cutting direction of X-axis and Y-axis, respectively. According to the above-mentioned results, it has been demonstrated that the proposed 3-axis positioning stage featured high precision positioning ability, and the oblique vibration cutting could reduce the cutting resistance. Future works are to conduct characteristic study on various materials by using oblique vibration cutting.