Improve Capability of TFT-LCD Array Photo Production Line by using System Simulation Method

碩士 === 國立高雄第一科技大學 === 電機工程研究所碩士在職專班 === 104 === A TFT-LCD array photo production line, including photoresist coating, exposure, and development processes, is key processes of producing TFT-LCD array. When a production line is stabilized, the machines, materials, and yields are stable. A challenge of...

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Bibliographic Details
Main Authors: Chih-Chen Yen, 顏志丞
Other Authors: Haw-ching Yang
Format: Others
Language:zh-TW
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/04556583160006751458