開發IC封裝製程電漿清洗基板技術

碩士 === 國立高雄第一科技大學 === 機械與自動化工程研究所 === 104 === Currently, the products of the IC package in the W/B(Wire Bond) station have to run the Plasma Cleaning process in order to improve the wire bond force capability, so I have to define the different parameters of the Plasma. However,because of the size an...

Full description

Bibliographic Details
Main Authors: Shang-Hung Liu, 劉尚宏
Other Authors: frank tzeng
Format: Others
Language:zh-TW
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/15250046762272850113