Implementation of Polysilicon Subwavelength Grating Reflectors in Standard Bulk CMOS Foundry Process
碩士 === 國立中山大學 === 光電工程學系研究所 === 104 === We have successfully demonstrated HCG reflectors in standard bulk CMOS by simply employing polysilicon gate as the high-index grating layer to reflect the 1310-nm and 1550-nm telecommunication wavelengths under normal incidence. Its design and fabrication stri...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/62447908066650672227 |