A Survey on the arsenic exposure of semiconductor equipment ion implanter operators during routine machine cleaning
碩士 === 國立中山大學 === 海洋環境及工程學系研究所 === 104 === The semiconductor manufacturing industry is one of the booming industry in Taiwan currently. Products often need to rely on high-tech equipment, as well as be added a lot of chemicals in the production process by enterprises. The Ion Implantation is an impo...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/42486396129108755269 |