Study of Zinc Oxide and Copper Oxide Bilayer Nanostructure for Ethanol Sensing Applications
碩士 === 國立中山大學 === 電機工程學系研究所 === 104 === In this thesis, we investigate the nanostructure of zinc oxide (ZnO) nanorods and copper oxide (CuO) nanoleaves. Two nanomaterials are stacked on silicon substrates for ethanol gas sensors. RF sputtering system is used to deposit a thin-film as a seed layer fo...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2016
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Online Access: | http://ndltd.ncl.edu.tw/handle/21796683194317791449 |