Study of Zinc Oxide and Copper Oxide Bilayer Nanostructure for Ethanol Sensing Applications

碩士 === 國立中山大學 === 電機工程學系研究所 === 104 === In this thesis, we investigate the nanostructure of zinc oxide (ZnO) nanorods and copper oxide (CuO) nanoleaves. Two nanomaterials are stacked on silicon substrates for ethanol gas sensors. RF sputtering system is used to deposit a thin-film as a seed layer fo...

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Bibliographic Details
Main Authors: Ming-Yuan Tsai, 蔡鳴遠
Other Authors: Feng-Renn Juang
Format: Others
Language:zh-TW
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/21796683194317791449