Fabrication of NiCrSi and NiCr thin film resistors with low TCR values
碩士 === 國立中山大學 === 電機工程學系研究所 === 104 === In this study, thin film resistors with low temperature coefficient of resistance (TCR) were fabricated. NiCr (80 wt% Ni , 20 wt% Cr), NiCrSi (55 wt% Ni , 40 wt% Cr , 5 wt% Si) and NiCrSi (5 wt% Ni , 20 wt% Cr , 75 wt% Si) were used as targets and the RF magne...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/84852198622419940443 |