Syntheses of crystalline Si films using microwave plasma at low temperature and their applications on flexible electronics
博士 === 國立清華大學 === 材料科學工程學系 === 104 === The purpose of this dissertation was to explore the approach of directly preparing high-quality crystalline Si films at low temperatures on a polyimide substrate for use in flexible crystalline Si film-based electronics. For this reason, a low-temperature techn...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2016
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/61692779296185798434 |