Investigation of Surface Profile by Multi-Wavelength Confocal Interference Microscope System
博士 === 國立清華大學 === 動力機械工程學系 === 104 === Since poor three-dimensional (3D) surface profile (SP) and roughness of components might degrade a system performance, precise determination of the 3D SP of optical surfaces and nano/micro- structures are essential to optimize the manufacturing process. Sinc...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/bf5qyj |