Improvement of CMOS-MEMS Pirani Vacuum Gauge Dynamic Range
碩士 === 國立清華大學 === 動力機械工程學系 === 104 === This study is based on CMOS standard process (TSMC 0.35μm 2P4M process) with post-process, metal wet etching, to develop Pirani vacuum gauge. Generally, Pirani vacuum gauge is composited of heater and heat sink. The sensing theory is based on heating to heater,...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/08647174792527758134 |