Improve Sensitivity of MEMS Piezoelectric Clamped Microphone Utilizing Patterned PZT Structure
碩士 === 國立清華大學 === 動力機械工程學系 === 104 === This study proposes sensitivity improvement for MEMS piezoelectric microphone to increase signal to noise ratio. Using finite element analysis and lumped element modal design the microphone structure. And piezoelectric microphone devices were fabricated on lead...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/31684879161901223151 |