Determining the Thin Film Mechanical Properties for CMOS Processes Using Micro Test Cantilevers
博士 === 國立清華大學 === 動力機械工程學系 === 104 === Standard process to develop MEMS device has gradually increased, especially exploiting CMOS process to implement MEMS device had been proposed. However, there is no complete mechanical properties database to provide designer in structural design. Therefore, in...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32136940976186595581 |