Effect of Fin Shape of Tapered FinFETs on Sub-16-nm Application using TCAD simulation
碩士 === 國立清華大學 === 工程與系統科學系 === 104 === In modern semiconductor industry, it keeps following Moore’s law. Short channel effects (SCE) has always been a serious issue to familiar with. As a result of this, CMOS device turned form traditional two-dimensional (2D) structure into a three-dimensional (3D)...
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| Format: | Others |
| Language: | en_US |
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2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32681103792274690053 |