Effect of Zr Interlayer on Residual Stress of ZrN Thin Films
碩士 === 國立清華大學 === 工程與系統科學系 === 104 === The purpose of this study was to investigate the effect of Zr interlayer on the residual stress of the upper ZrN thin film and to evaluate the usability of ZrN/Zr bilayer coatings. It is commonly acknowledged that using a metal interlayer can relieve the residu...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/75189519761048477342 |