Numerical and Experimental Study of Silane/Hydrogen Plasma for Intrinsic Amorphous Silicon Film Deposition
碩士 === 國立清華大學 === 工程與系統科學系 === 104 === The purpose of this study is to investigate the influence of the plasma property on the thin film property. This study includes both experimental and simulation analysis, the simulation part used a two-dimensional fluid model for PECVD (Plasma enhanced chemical...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/04225087695340887418 |