Fabrication and Characterization of Lithium-Niobate Thin Film MEMS Piezoelectric Resonators
碩士 === 國立清華大學 === 奈米工程與微系統研究所 === 104 === This work implements single crystal X-cut thin film Lithium Niobate (LN) in order to achieve a high electromechanical coupling coefficient kt^2.of the shear horizontal acoustic plate wave (SH-APM) resonators. The design of the device is carried out by the Fi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/41722073959268680721 |