A Wide-Range CMOS-MEMS Pressure Sensor with Combined Resonant and Thermal Transducers
碩士 === 國立清華大學 === 奈米工程與微系統研究所 === 104 === This work reports the realization of double ended tuning fork (DETF) resonant transducer and Pirani gauge on a single device through the use of TSMC 0.35μm CMOS process technology. Through the measurement of DETF resonator under different pressure, a dynamic...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2015
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80464553274780353034 |