Design and Implementation of CMOS-MEMS Capacitive Microphone with Serpentine Spring Structure
碩士 === 國立清華大學 === 奈米工程與微系統研究所 === 104 === This study presents two different CMOS-MEMS microphone designs with serpentine spring structure. The serpentine spring structure not only can decrease the stiffness of diaphragm but also can change the diaphragm motion into piston-type movement to improve th...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/13312543011966624441 |