Study of HfZnO thin films by sol-gel method and the application for thin film transistor
碩士 === 國立臺南大學 === 材料科學系碩士班 === 104 === In this study, Hf-doped ZnO films were prepared by sol-gel method on silicon substrate and glass. The effect of the HZO films properties on Hf doping ratios and annealing temperature was discussed. We use X-ay diffraction (XRD) and scanning electronic microscop...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/mfa8fz |