Study of the Turbo-molecular vacuum pump pumping efficiency

碩士 === 國立臺南大學 === 綠色能源學科技學系碩士在職專班 === 104 === The semiconductor industry was one of the《Two Trillion, Twin Stars industrial development plan》China's《national development priorities plan》among. The so-called《two trillion industry》refers to the future are more than a trillion more than the output...

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Bibliographic Details
Main Authors: Kai-Yun Wang, 王開運
Other Authors: I-Tseng Tang
Format: Others
Language:zh-TW
Published: 2016
Online Access:http://ndltd.ncl.edu.tw/handle/90275173172256427309