Study of the Turbo-molecular vacuum pump pumping efficiency

• Main Authors: Kai-Yun Wang, 王開運
• Other Authors: I-Tseng Tang
• Format: Others
• Language: zh-TW
• Published: 2016
• Online Access: http://ndltd.ncl.edu.tw/handle/90275173172256427309

碩士 === 國立臺南大學 === 綠色能源學科技學系碩士在職專班 === 104 === The semiconductor industry was one of the《Two Trillion, Twin Stars industrial development plan》China's《national development priorities plan》among. The so-called《two trillion industry》refers to the future are more than a trillion more than the output value of NT, the semiconductor industry and the image display industry. The semiconductor industry can be said to be the main source of economic development in Taiwan in recent years, in the face of global competition under, capable of mastering advanced process technology and enhance the yield to reduce costs and increase profits under the goal, in the semiconductor device investment amount is quite high.Related spare parts semiconductor wafer processing equipment, which has the characteristics of the supply chain is highly uncertain demand and supply, with the usual general electronics, information, manufacturing supply chain characteristics are quite different. Semiconductor equipment suppliers supply chain must have a high degree of responsiveness to customers at any time to solve the problem immediately occur, to meet customer demand.This study was designed to investigate the semiconductor device in the semiconductor equipment subsidiary turbo-molecular vacuum pump, many brands under competitive conditions, demonstrating its effectiveness equipment advantage. Supplied to the semiconductor wafer manufacturing company, panel manufacturing company, its equipment correctness of the choice to reduce energy consumption and unnecessary waste of resources.The semiconductor device to a high vacuum turbo-molecular vacuum pump is the focus of this research, investigate compare Edwards factory equipment, laboratory analysis through pumping efficiency, identify the device uses optimized. Actively develop defects on the customers to provide solutions to improve as the company's competitive strategy.