Passive Magnetic Shielding System in ELF
碩士 === 國立臺灣大學 === 土木工程學研究所 === 104 === The extremely low frequency (ELF) magnetic field has significant impact on yield rate especially when the technical note reaches less than 14 nanometer in next-generation nano-Fab. For sensitive equipment such as the SEMs, TEMs, STEMs, FIB writers, and E-beam w...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/74892080223845566756 |