Analyses of Yttrium Oxide and Yttrium–doped Germanium Oxide on Germanium by Oxide MBE
碩士 === 國立臺灣大學 === 電子工程學研究所 === 104 === In the dissertation, the oxide MBE system was harnessed to synthesize both yttrium oxide（Y_2 O_3）and yttrium – doped germanium oxide（Y - GeO_2）on germanium substrate. Then, the metal – oxide – semiconductor capacitor, MOSCap, devices were fabricated after meta...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/57688629386416217567 |