Development of Atmospheric Pressure Plasma Jet System and the Improvement of Large Area Ga-doped ZnO Uniformity
碩士 === 國立臺灣大學 === 機械工程學研究所 === 104 === There are several methods for coating transparent conductive oxide (TCO) thin films; Atmospheric Pressure Plasma Jet (APPJ) is one of those. The advantages for APPJ are: the deposition is done at the atmospheric environment, so we can save the cost of vacuum, w...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/77979759003571416029 |