Radial Basis Function Networks for CD Reconstruction in Coherent Fourier Scatterometry
碩士 === 國立臺灣科技大學 === 自動化及控制研究所 === 104 === This study applies radial basis function networks (RBFN) in coherent Fourier scatterometry (CFS) to reconstruct the geometrical parameters of nanostructures. As the dimension of periodic nanostructures is denser and more complex, the demand of precise and se...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/8z7kgj |