Growth and characterization of cobalt oxide and copper doped cobalt oxide thin films prepared by reactive ion beam sputter deposition
碩士 === 國立臺灣科技大學 === 電子工程系 === 104 === Cobalt oxide and copper doped cobalt oxide have been deposited by reactive ion beam sputter deposition. The effect of deposition temperatures and oxygen partial flow rates Opf (= O2/(O2+Ar)) on the properties of cobalt oxide and copper-cobalt oxide thin films...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/60287375506989162329 |