Triple Patterning Lithography-aware Detailed Routing Ensuring Via Layer Decomposability
碩士 === 國立臺灣科技大學 === 電機工程系 === 104 === For sub-10 nanometer technology nodes, multiple patterning technologies are still the major solutions for pushing the limit of lithography due to the delay of next generation lithography technologies. In this thesis, we propose a triple patterning lithography (T...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/3227bw |