Air Pollution Characteristics and Fingerprint of Integrated Circuits Industries-A Case Study on Wafer Fabrication
碩士 === 國立臺北科技大學 === 環境工程與管理研究所 === 104 === This study explores the air pollution characteristics of Wafer Fabrication by raw materials analysis and Emission detection. Based on the hazardous properties of volatile organic compounds, ozone formation potential characteristics and industry (or process)...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Online Access: | http://ndltd.ncl.edu.tw/handle/yr8xr5 |