Modeling and Time Domain Analysis for Gas Heating of Semiconductor Process
碩士 === 國立臺北科技大學 === 新能源電控產業碩士專班 === 104 === In semiconductor plants, numerous machines (e.g., production equipment and public/facilities) use heaters in the heat treatment of raw materials or other equipment. Therefore, the development and application of advanced heating technologies are goals that...
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| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/j34frb |