Diamond-like Carbon Films Deposited on Alumina Balls
碩士 === 國立臺北科技大學 === 製造科技研究所 === 104 === Diamond like carbon (DLC)films were deposited on alumina (Al2O3) plate substrate and alumina ball by the microwave plasma jet chemical vapor deposition (MPJCVD) system. Microstructures and quality of the deposited DLC/Al2O3 were studied using the scanning elec...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/6yadu3 |