Study of accurancy compensation for single-axis position stage
碩士 === 國立臺北科技大學 === 機電整合研究所 === 104 === The purpose of this study is to measure the position error of single axis moving stage caused by thermal deformation of ball screw at different temperature and do the compensation to the stage.To simplify the topic, we focus on single moving stage instead of a...
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| Format: | Others |
| Online Access: | http://ndltd.ncl.edu.tw/handle/4bkfq4 |