Design and Characterization of CMOS MEMS 3-Axis Micro-Fluxgate Magnetic Sensor
碩士 === 國立臺北科技大學 === 機電整合研究所 === 104 === This research followed the previous research results of CMOS MEMS fluxgate in our laboratory as the basic theoretical knowledge. In this work, a new type of 3-axis micro fluxgate with planar coils, magnetic core and flux guide techniques was designed and manuf...
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/kh9wbz |