The Influence of wafer position and amount to the distribution of relative humidity (RH) on wafer surfaces when the downflow of EFEM (Equipment Front-End Module) invades to the FOUP under door open condition.

碩士 === 國立臺北科技大學 === 能源與冷凍空調工程系碩士班 === 104 === Over the past fifteen years ago opened pod system (FOUP (Front Opening Unified Pod) / LPU (Load-port Unit)) has been adopted by the majority of twelve inches and a semiconductor plant which has been shown to provide a no ( or very little) particle contam...

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Bibliographic Details
Main Authors: WANG TIEN-YI, 王添毅
Other Authors: Shin-Cheng Hu
Format: Others
Language:zh-TW
Online Access:http://ndltd.ncl.edu.tw/handle/2td52a