The Influence of wafer position and amount to the distribution of relative humidity (RH) on wafer surfaces when the downflow of EFEM (Equipment Front-End Module) invades to the FOUP under door open condition.
碩士 === 國立臺北科技大學 === 能源與冷凍空調工程系碩士班 === 104 === Over the past fifteen years ago opened pod system (FOUP (Front Opening Unified Pod) / LPU (Load-port Unit)) has been adopted by the majority of twelve inches and a semiconductor plant which has been shown to provide a no ( or very little) particle contam...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/2td52a |