Study on LiNbO3 Lateral Field Excited Humidity Sensors
碩士 === 大同大學 === 機械工程學系(所) === 104 === This thesis aims at developing a low-cost and high-sensitivity humidity sensor module which could work at room temperature by combining a Lithium Niobate (LiNbO3) lateral field excited sensor with ZnO nanowire sensing film. First of all, bulk waves in LiNbO3 are...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2016
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| Online Access: | http://ndltd.ncl.edu.tw/handle/28247904787429080855 |