Growth of Large-Scale Single-Layered MoS2 Film via MoO3 Vapor Management and Characterization of MoS2 Thin-Film Transistor Arrays

碩士 === 國立中正大學 === 光機電整合工程研究所 === 105 === In this study, we have successfully grown the large-scale single-layered MoS2 film by using the atmosphere chemical vapor deposition (APCVD) via MoO3 vapor managements. Raman spectroscopy, Photoluminescence and Atomic Force Microscopy confirmed the MoS2 films...

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Bibliographic Details
Main Authors: CHEN, HUNG-YI, 陳鴻毅
Other Authors: WANG, HSIANG-CHEN
Format: Others
Language:zh-TW
Published: 2017
Online Access:http://ndltd.ncl.edu.tw/handle/mj9838