The Study of IGZO Sensing Membrane in Electrolyte-Insulator-Semiconductor (EIS) Applications
碩士 === 長庚大學 === 電子工程學系 === 105 === In this thesis, the indium gallium zinc oxide pH-sensing membrane deposited on silicon oxide substrate was used to fabricate a membrane electrolyte-insulator-semiconductor (EIS) device by reactive RF sputtering. At first, we studied the effect of RF sputtering with...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/95db3h |