Dispatching Rules of Improve Capacity Utilization of Automated Material Handling System in 450mm Fab
碩士 === 國立高雄應用科技大學 === 工業工程與管理系 === 105 === Semiconductor wafer size from 300mm to 450mm is the current trend, wafer size and weight increase caused by handling difficulties, and fab need to have the shortest delivery time and a small amount of diversity, therefore an effective automated material han...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/03281973474289665041 |