Dispatching Rules of Improve Capacity Utilization of Automated Material Handling System in 450mm Fab

• Main Authors: LIN, JIA-HAO, 林佳壕
• Other Authors: WANG, CHIA-NAN
• Format: Others
• Language: zh-TW
• Published: 2017
• Online Access: http://ndltd.ncl.edu.tw/handle/03281973474289665041

碩士 === 國立高雄應用科技大學 === 工業工程與管理系 === 105 === Semiconductor wafer size from 300mm to 450mm is the current trend, wafer size and weight increase caused by handling difficulties, and fab need to have the shortest delivery time and a small amount of diversity, therefore an effective automated material handling system (AMHS) is required to control by the International Technology Roadmap for Semiconductors (ITRS) as the primary means of transportation for 450mm fab. In the AMHS of direction loop, OHT is easy to transport and often caused when the vehicle plug, affect the overall performance of the fab and take into account the emergency batch (Hot lots) need to prioritize thus proposing a set of output maximization In this study, the simulation software Flexsim was used to set the loading ports in front of each machine. A virtual 450mm fab was set up to compare the efficiency before and after the setup. And machine waiting time for analysis and evaluation, this purpose is to increase the output and reduce the base station waiting time. Finally, the results of this study point out that, in the case of constant resources, there is no set wait area in the event of problems can effectively solve the problem of production.