A Highly Sensitive Pirani Gauge with Dual Sensing Materials
碩士 === 國立高雄應用科技大學 === 光電與通訊工程研究所 === 105 === A novel and highly sensitive CMOS-MEMS Pirani gauge with dual sensing materials is presented in this paper. In order to extremely improve the sensitivity of Pirani gauges, this study integrated the structure of a Wheatstone bridge and dual sensing materia...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/k379ph |