Effect of Interlayer on the Structure and Properties of ZrWN Muil-Nitride Hard Films
碩士 === 龍華科技大學 === 機械工程系碩士班 === 105 === In this study, the effect of interlayer on ZrWN hard film was analyzed by reactive DC magnetron sputtering (DCMS). Ar is a sputtering gas, N2 is a reaction gas, and is deposited on a porcelain-gold cutting tool (NX2525, Mitsubishi), glass and SUS 304 stainless...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2017
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| Online Access: | http://ndltd.ncl.edu.tw/handle/kpz7vh |